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Cleanroom Evaluation

We are recognized as a world leader in cleanroom contamination control and reduction.

Balazs™ participates in ITRS committees and offer its expertise to advance cleanroom materials and technologies. We stay at the leading edge through innovative methodology development for lower detection limits.


  • Organics
  • Metals
  • Anions
  • Cations
  • Particles
  • Dopants

Sample Types and Techniques

Cleanroom Surfaces and Equipment Contamination
  • Wipe analysis for trace metals by ICP-MS, anions by ion chromatography and organics by FTIR
Material and Components Analyses
  • In-instrument outgassing by dynamic headspace gas chromatography mass spectroscopy (DHS GC-MS) 
  • Off-line room temperature 40% RH air outgassing by GC-MS
  • Off-line selected temperature outgassing by GC-MS
  • IDEMA semi-quantitative DHS-TD-GC-MS Outgassing M11-99

Cleanroom Air Analysis and Witness Wafers

  • Trace metals in air and on witness wafers
  • Dopants in air and on witness wafers (B, P, As, Sb)
  • Acids and bases in air (including ammonium and amines)
  • Organics in air and on witness wafers
  • Balazs™ also offers SEMI F21-1102 analysis for classification of molecular acids, bases, condensables and dopants

Application Notes

APP0354 Cleanroom Air Monitoring
APP0355 Cleanroom SEMI F21-1102 Specification
APP0356 Particle Counts in UPW
APP0369 Bases in Air and Ultrahigh Purity Gases
APP0381 Static Extraction Leach Testing of Material
APP0452 IEST Working Group and Recommended Practice Support
APP0459 FTIR and Raman spectroscopies for organic
APP0466 Contamination Identification

Interested in our cleanroom evaluation services?

From straightforward compressed gas analysis, to air sampling and customized wet-chemical digestion schemes, our world-leading resources are the perfect fit for your unique needs.

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