Cleanroom Evaluation
We are recognized as a world leader in cleanroom contamination control and reduction.
Balazs™ participates in ITRS committees and offer its expertise to advance cleanroom materials and technologies. We stay at the leading edge through innovative methodology development for lower detection limits.
Analyses
- Organics
- Metals
- Anions
- Cations
- Particles
- Dopants
Sample Types and Techniques
Cleanroom Surfaces and Equipment Contamination
- Wipe analysis for trace metals by ICP-MS, anions by ion chromatography and organics by FTIR
Material and Components Analyses
- In-instrument outgassing by dynamic headspace gas chromatography mass spectroscopy (DHS GC-MS)
- Off-line room temperature 40% RH air outgassing by GC-MS
- Off-line selected temperature outgassing by GC-MS
- IDEMA semi-quantitative DHS-TD-GC-MS Outgassing M11-99
Cleanroom Air Analysis and Witness Wafers
- Trace metals in air and on witness wafers
- Dopants in air and on witness wafers (B, P, As, Sb)
- Acids and bases in air (including ammonium and amines)
- Organics in air and on witness wafers
- Balazs™ also offers SEMI F21-1102 analysis for classification of molecular acids, bases, condensables and dopants
Application Notes
| APP0354 Cleanroom Air Monitoring | |
|---|---|
| APP0355 Cleanroom SEMI F21-1102 Specification | |
| APP0356 Particle Counts in UPW | |
| APP0369 Bases in Air and Ultrahigh Purity Gases | |
| APP0381 Static Extraction Leach Testing of Material | |
| APP0452 IEST Working Group and Recommended Practice Support | |
| APP0459 FTIR and Raman spectroscopies for organic | |
| APP0466 Contamination Identification |
Interested in our cleanroom evaluation services?
From straightforward compressed gas analysis, to air sampling and customized wet-chemical digestion schemes, our world-leading resources are the perfect fit for your unique needs.