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Film Characterization

Our specialization in thin film characterization enables us to offer a comprehensive range of cutting-edge technologies that assist companies in their research and development, as well as manufacturing processes.

Typical Films Analyzed

Semiconductor and Disk Drive
  • Silicon, native and thermal silicon oxides, silicon nitride, and silicon oxynitride
  • BSG, PSG, and BPSG low-k dielectrics
  • Atomic layer deposition (ALD) metal oxides
  • Aluminum, copper doped aluminum, copper, and other films used for interconnect
  • Alumina, anodized alumina, diamond, graphite, and SiC
  • SiGe, GaAs, TiW, NiCr, FeCr, III-V and II-VI films
  • GST, SST and other phase change memory (PCM)
  • NiP and hard disks
  • Others...
Photovoltaic and Solar
  • Silicon films (single, polysilicon, and ribbon)
  • CdTe
  • CIG, CdS, Indium (In) and CIGS
  • Carbon / graphite
  • AZO and other TCO front contact
  • Mo, Cu, and other back contacts
  • Encapsulation thin films
  • Others...

Analyses Provided

  • Compositional analysis
  • Depth profiling, line scan and three-dimensional mapping
  • Microscopic or local analysis for contamination identification
  • Surface analysis
  • Trace in-film impurity analysis

Analytical Techniques

  • Glow discharge optical emission spectroscopy (GD-OES)
  • Inductively coupled plasma mass spectrometry (ICP-MS)
  • Inductively coupled plasma optical emission spectroscopy (ICP-OES)
  • Laser ablation inductively coupled plasma mass spectrometry (LA ICP-MS)
  • Energy dispersive spectroscopy (SEM-EDS)
  • Secondary ion mass spectrometry (SIMS)
  • UV/Vis spectroscopy
  • X-ray fluorescence (XRF)
  • Auger (AES)
  • Electron spectroscopy for chemical analysis / X-ray photoelectron spectroscopy (ESCA/XPS)
  • Interstitial gas analysis
  • Minority carrier lifetime measurement (MCL)
  • Rutherford backscattering spectroscopy (RBS)
  • Time of flight secondary ion mass spectrometry (TOF-SIMS)
  • X-ray diffraction (XRD), total reflection X-ray fluorescence (TXRF), and X-ray imaging

Application Notes

APP0313 SARIS Material Analysis
APP0353 Material Analyses Organic and Inorganic
APP0367 Comprehensive BPSG Thin Film Analysis
APP0450 Advanced Elemental Depth Profiling
APP0455 GD-OES for Element Survey Depth Profiling
APP0462 Film Characterization
APP0466 Contamination Identification

Interested in our film characterization services?

From straightforward compressed gas analysis, to air sampling and customized wet-chemical digestion schemes, our world-leading resources are the perfect fit for your unique needs.

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