Material and Component Evaluation
Materials and components used throughout the fab are potential sources of contamination. Our expertise will allow you to determine actual levels of cleanliness and whether a material or component can introduce unwanted contamination.
Sample Types
Materials are tested for surface and bulk contamination
- Wafer carriers/shippers
- Valves
- Wafers
- Filters and their components
- Piping material
- Tubing/hoses and fittings
- Reactor components
- Wipes, rollers and brushes
- Gloves, gowns and disposables
- Wet bench material
- Polymeric resin beads
- HEPA/ULPA filters
- Any material contained or processed in the cleanroom environment
Analyses Provided
- Metals
- Anions
- Cations
- Organics
- Particles
Techniques
Sampling
- UPW extraction
- Acid extraction
- Solvent extraction
- Direct surface analysis
Analytical
- Laser ablation inductively coupled plasma mass spectrometry (LA ICP-MS)
- Glow discharge optical emission spectroscopy (GD-OES)
- Fourier transform infrared spectroscopy (FTIR)
- Raman spectroscopy
- Ultraviolet / visible spectroscopy (UV/VIS)
- Gas chomatography mass spectrometry (GC-MS)
- Thermal desorption gas chomatography mass spectrometry (TD GC-MS)
- Liquid chromatography (LC)
- Thermal gravimetric analysis (TGA)
- Thermo-mechanical analysis (TMA)
- Differential scanning calorimetry (DSC)
Application Notes
| APP0313 SARIS Material Analysis | |
|---|---|
| APP0353 Material Analyses Organic and Inorganic | |
| APP0357 Organic Outgas Analysis | |
| APP0365 Chemicals and Materials | |
| APP0381 Static Extraction Leach Testing of Materials | |
| APP0394 Alpha Particle Emissivity Counting | |
| APP0452 IEST Working Group and Recommended Practice Support | |
| APP0459 FTIR and Raman spectroscopies for organic testing |
Interested in our material and component evaluation services?
From straightforward compressed gas analysis, to air sampling and customized wet-chemical digestion schemes, our world-leading resources are the perfect fit for your unique needs.