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Material and Component Evaluation

Materials and components used throughout the fab are potential sources of contamination. Our expertise will allow you to determine actual levels of cleanliness and whether a material or component can introduce unwanted contamination.

Sample Types

Materials are tested for surface and bulk contamination

  • Wafer carriers/shippers
  • Valves
  • Wafers
  • Filters and their components
  • Piping material
  • Tubing/hoses and fittings
  • Reactor components
  • Wipes, rollers and brushes
  • Gloves, gowns and disposables
  • Wet bench material
  • Polymeric resin beads
  • HEPA/ULPA filters
  • Any material contained or processed in the cleanroom environment

Analyses Provided

  • Metals
  • Anions
  • Cations
  • Organics
  • Particles


  • UPW extraction
  • Acid extraction
  • Solvent extraction
  • Direct surface analysis
  • Laser ablation inductively coupled plasma mass spectrometry (LA ICP-MS)
  • Glow discharge optical emission spectroscopy (GD-OES)
  • Fourier transform infrared spectroscopy (FTIR)
  • Raman spectroscopy
  • Ultraviolet / visible spectroscopy (UV/VIS)
  • Gas chomatography mass spectrometry (GC-MS)
  • Thermal desorption gas chomatography mass spectrometry (TD GC-MS)
  • Liquid chromatography (LC)
  • Thermal gravimetric analysis (TGA)
  • Thermo-mechanical analysis (TMA)
  • Differential scanning calorimetry (DSC)

Application Notes

APP0313 SARIS Material Analysis
APP0353 Material Analyses Organic and Inorganic
APP0357 Organic Outgas Analysis
APP0365 Chemicals and Materials
APP0381 Static Extraction Leach Testing of Materials
APP0394 Alpha Particle Emissivity Counting
APP0452 IEST Working Group and Recommended Practice Support
APP0459 FTIR and Raman spectroscopies for organic testing

Interested in our material and component evaluation services?

From straightforward compressed gas analysis, to air sampling and customized wet-chemical digestion schemes, our world-leading resources are the perfect fit for your unique needs.

Request a quote