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Wafer Testing

We offer analytical characterization of wafers that is the building block of many device technologies.

We provide a wide variety of analytical services to ensure your water system quality remains consistently high purity. Key industries we support are semiconductor/electronics, pharmaceutical, nuclear power, solar and medical.

Sample Types

  • Production wafer - 450 mm or smaller
    • Bare 
    • Oxide 
    • BPSG 
    • SiN 
    • GaAs 
    • Other
  • Ion implantation
  • Thermal annealing furnace

Analyses Provided

  • Trace metals
  • Dopants
  • Organics
  • Ionic haze
  • Particle deposition
  • Defect density
  • Surface roughness
  • Evaluation of Ra for thin film materials prior to and after processing (includes chemical and physical etching)
  • Grain size and shape


  • Surface profiles of thin film and thick coatings
  • Metrology of semiconductor devices, LED’s and PV thin films
  • Surface finish of glass and metal substrates
  • Materials evaluation
  • Quality control


  • Vapor phase decomposition inductively coupled plasma mass spectroscopy (VPD ICP-MS)
  • Total reflection X-ray fluorescence (TXRF)
  • Drop scan etch (DSE) ICP-MS
  • Thermal desorption gas chromatography (TD GC-MS)
  • Atomic force microscope (AFM)
  • Particle deposition
  • Etch pit density determination

Application Notes

APP0313 SARIS Material Analysis
APP0356 Particle Counts in UPW
APP0357 Organic Outgas Analysis
APP0368 Witness Wafers Contamination Analysis
APP0450 Advanced Elemental Depth Profiling
APP0455 GD-OES for Element Survey Depth Profiling
APP0466 Contamination Identification
APP0467 Wafer Surface Testing

Interested in our wafer testing services?

From straightforward compressed gas analysis, to air sampling and customized wet-chemical digestion schemes, our world-leading resources are the perfect fit for your unique needs.

Request a quote