Wafer Testing
We offer analytical characterization of wafers that is the building block of many device technologies.
We provide a wide variety of analytical services to ensure your water system quality remains consistently high purity. Key industries we support are semiconductor/electronics, pharmaceutical, nuclear power, solar and medical.
Sample Types
- Production wafer - 450 mm or smaller
- Bare
- Oxide
- BPSG
- SiN
- GaAs
- Other
- Ion implantation
- Thermal annealing furnace
Analyses Provided
- Trace metals
- Dopants
- Organics
- Ionic haze
- Particle deposition
- Defect density
- Surface roughness
- Evaluation of Ra for thin film materials prior to and after processing (includes chemical and physical etching)
- Grain size and shape
Applications
- Surface profiles of thin film and thick coatings
- Metrology of semiconductor devices, LED’s and PV thin films
- Surface finish of glass and metal substrates
- Materials evaluation
- Quality control
Techniques
- Vapor phase decomposition inductively coupled plasma mass spectroscopy (VPD ICP-MS)
- Total reflection X-ray fluorescence (TXRF)
- Drop scan etch (DSE) ICP-MS
- Thermal desorption gas chromatography (TD GC-MS)
- Atomic force microscope (AFM)
- Particle deposition
- Etch pit density determination
Application Notes
| APP0313 SARIS Material Analysis | |
|---|---|
| APP0356 Particle Counts in UPW | |
| APP0357 Organic Outgas Analysis | |
| APP0368 Witness Wafers Contamination Analysis | |
| APP0450 Advanced Elemental Depth Profiling | |
| APP0455 GD-OES for Element Survey Depth Profiling | |
| APP0466 Contamination Identification | |
| APP0467 Wafer Surface Testing |
Interested in our wafer testing services?
From straightforward compressed gas analysis, to air sampling and customized wet-chemical digestion schemes, our world-leading resources are the perfect fit for your unique needs.