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Process Tool Cleanliness Evaluation

We offer non-destructive test methods to characterize the surface cleanliness of tool parts, components and assemblies. Our experience with measuring parts cleanliness extends over 20 years.

Sample Types

Tool Part, Component and Assembly
  • Ceramics: quartz, alumina, glass and sapphire
  • Metals: aluminum, stainless steel, molybdenum and copper
  • Plastics: polyimide, PEEK, PTFE, Kapton, and Viton
  • Coatings: plating, anodizing and powder coating
Cleaning Process Evaluation
  • Wet benches
  • Spray tools
  • Chemical mechanical polishing (CMP)

Analyses Provided

  • Metals
  • Organics
  • Ionics
  • Particles
  • Surface Analysis
  • Critical Wipes (VC)


  • Acid extraction
  • Ultrapure water extraction
  • Solvent extraction
  • Drop scan etch (DSE)
  • Outgassing Analysis
  • Assay by Titration methods
  • Inductively coupled plasma mass spectroscopy (ICP-MS)
  • Energy dispersive spectroscopy (EDS)
  • Gas chromatography mass spectroscopy (GC-MS)
  • Fourier transform infrared (FTIR)
  • Raman spectroscopy
  • Total organic carbon (TOC)
  • Ion chromatography (IC)
  • Liquid particle counting (LPC)
  • Non-volatile residue (NVR)
  • Thermal Desorption Spectroscopy (TDS or RGA)
  • XPS (VC)

Application Notes

APP0313 SARIS Material Analysis
APP0357 Organic Outgas Analysis
APP0384 Qualification of Lithography Tools
APP0456 Vapor Phase Decomposition ICP-MS
APP0462 Film Characterization
APP0466 Contamination Identification
APP0468 Coupons and Parts Cleanliness Testing
APP0469 Surface Cleanliness Testing
APP0470 Photovoltaic Contamination Solution

Interested in our process tool cleanliness evaluation services?

From straightforward compressed gas analysis, to air sampling and customized wet-chemical digestion schemes, our world-leading resources are the perfect fit for your unique needs.

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