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ESD and Corona Air Ionizer Tip Deposit Analysis

We provide both sampling kits as well as analytical services to identify elements and compounds present in air ionizer tip deposits, which have formed as a result of the air ionizers reacting with Airborne Molecular Contamination (AMC) in cleanroom air.

With tip deposit identification, Balazs™ is able to help identify elements that aids pinpointing the AMC source, leading to the elimination/control of AMC. Such sampling and analyses can improve ionizer performance, reduce particulation and decrease risk to wafers, optics, reticles and scanners.

Sampling Methods

  • Tip removal (for ceiling emitters)
  • Crush tubes/ swabs (call first to discuss)
  • Quadbars (call first to discuss)

Sampling Kits Offered

  • Tip removal kit (for ceiling emitters)
  • Balazs™ custom tweezers, 8 tip holders, field sampling instructions

To request a sample kit, click here.

Analytical Techniques

  • Scanning Electron Microscopy with Energy Dispersive X-Ray Spectroscopy (SEM-EDS), used for main elemental ID, provides surface analysis
  • Inductively Coupled Plasma Mass Spectrometry (ICP-MS), used for quantitative results of entire tip deposit

Reference document

APP0483 Air Ionizer Tip Deposit Analysis

Interested in our ESD and corona air ionizer tip deposit analysis services?

From straightforward compressed gas analysis, to air sampling and customized wet-chemical digestion schemes, our world-leading resources are the perfect fit for your unique needs.

Request a quote