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Chemical Testing

Chemical characterization is critical for incoming quality control, at the point of distribution (POD), and at the point of use (POU) to ensure that chemical species and/or contamination is at a proper concentration for semiconductor process steps.

Sample Types

  • Cleaning chemicals
  • Processing chemicals
  • Lithographic chemicals
  • Etching chemicals
  • Copper plating solutions
  • CVD/ALD Precursor Compounds
  • Slurries

Analyses and Services Provided

  • Trace Metals
  • Anions
  • Organics
  • Assay
  • Material compatibility studies
  • SEMI tests


  • Inductively coupled plasma mass spectroscopy (ICP-MS)
  • Inductively coupled plasma optical emission spectroscopy (ICP-OES)
  • Ion chromatography (IC)
  • Gas chromatography mass spectroscopy (GC-MS)
  • Fourier transform infrared (FTIR)
  • Auto-titrator 
Slurry off-line testing solutions
  • Particle size and distribution
  • % solids
  • Specific gravity
  • pH
  • Viscosity
  • Titration for H2O2 or other additives
  • Trace metals
  • Corrosion inhibitors
  • Particles
Slurry on-line testing solutions

Application Notes

APP0350 Analysis of CVD ALD Precursor Compounds
APP0356 Particle Counts in Ultra Pure Water
APP0365 Chemicals and Materials
APP0375 Slurry Characterization Services
APP0466 Contamination Identification

Interested in our chemical testing services?

From straightforward compressed gas analysis, to air sampling and customized wet-chemical digestion schemes, our world-leading resources are the perfect fit for your unique needs.

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