Documentation Library [ Return to References ]
Ion-Chromatographic Determination of Seven Common Anions in Electronic-Grade, Water Miscible Solvents
Accurate Analysis of Precursor Compounds
Are Your Precursor Analyses Accurate? The Trouble with Hafnium Precursors
Dr. Phil Clancy and Dr. Scott Anderson
Analytical Insight, 2006
Optimizing the Selection an Supply of Hf Precursor Candidates for Gate Oxide
A. Soulet, L. Duquesne, G. Jursich, R. Inman, A. Misra, N. Blasco, C. Lachaud, Y. Marot, R. Prunier, M. Vautier, S. Anderson, P. Clancy, M. Havlicek
Semiconductor Fabtech, 2005
Ion-pair Chromatography of Bis (Sodium-Sulfopropyl) Disulfide Brightener in Acidic Copper Plating Baths
Statistical Analysis of Externally Calibrated Measurement Systems
Lynn Vanatta, David Coleman
SPWCC, 2004
Determination of Chloride and Sulfate in Semiconductor-Grade Etchants Comprised of Acetic Acid, Nitric Acid and Phosphoric Acid
Reproducible Digestion Method for Ion-Chromatographic Analysis of Anions in 30% Hydrogen Peroxide
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