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Process Tool Cleanliness Evaluation

Balazs NanoAnalysis offers non-destructive test methods to characterize the surface cleanliness of tool parts, components and assemblies. Our  experience with measuring parts cleanliness extends over 20 years.

Sample Types

Tool Part, Component and Assembly

  • Ceramics: quartz, alumina, glass and sapphire
  • Metals: aluminum, stainless steel, molybdenum and copper
  • Plastics: polyimide, PEEK, PTFE, Kapton, and Viton
  • Coatings: plating, anodizing and powder coating

Cleaning Process Evaluation

  • Wet benches
  • Spray tools
  • Chemical mechanical polishing (CMP)

Analyses Provided

  • Metals
  • Organics
  • Ionics
  • Particles



  • Acid extraction
  • Ultrapure water extraction
  • Solvent extraction
  • Drop scan etch (DSE)


  • Inductively coupled plasma mass spectroscopy (ICP-MS)
  • Energy dispersive spectroscopy (EDS)
  • Gas chromatography mass spectroscopy (GC-MS)
  • Fourier transform infrared (FTIR)
  • Raman spectroscopy
  • Total organic carbon (TOC)
  • Ion chromatography (IC)
  • Liquid particle counting (LPC)
  • Non-volatile residue (NVR)

Read Related Documentation

Technical Information

Quick Links to papers, guidelines, application notes...

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Contact Us

Phone: 510 624 4000

Fax: 510 657 2292

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Request for Analysis

Please download and complete the appropriate RFA. Submit this to info@Balazs.com for a quote or include it with your samples for an analysis.