Process Tool Cleanliness Evaluation  [ Return to  Products & Services  ]

Tool Part, Component and Assembly

• Ceramics: quartz, alumina, glass and sapphire
• Metals: aluminum, stainless steel, molybdenum and copper
• Plastics: polyimide, PEEK, PTFE, Kapton, and Viton
• Coatings: plating, anodizing and powder coating

Cleaning Process Evaluation

• Wet benches
• Spray tools

• Metals
• Organics
• Ionics
• Particles

Sampling

• Acid extraction
• Ultrapure water extraction
• Solvent extraction
• Drop scan etch (DSE)

Analytical

• Inductively coupled plasma mass spectroscopy (ICP-MS)
• Energy dispersive spectroscopy (EDS)
• Gas chromatography mass spectroscopy (GC-MS)
• Fourier transform infrared (FTIR)
• Raman spectroscopy
• Total organic carbon (TOC)
• Ion chromatography (IC)
• Liquid particle counting (LPC)
• Non-volatile residue (NVR)

Articles and Papers

Application Notes