Material and Component Evaluation
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Materials and components used throughout the fab are potential sources of contamination. Balazs NanoAnalysis expertise will allow you to determine actual levels of cleanliness and whether a material or component can introduce unwanted contamination.
Sample Types
Materials are tested for surface and bulk contamination
- Wafer carriers/shippers
- Valves
- Wafers
- Filters and their components
- Piping material
- Tubing/hoses and fittings
- Reactor components
- Wipes, rollers and brushes
- Gloves, gowns and disposables
- Wet bench material
- Polymeric resin beads
- HEPA/ULPA filters
- Any material contained or processed in the cleanroom environment
Analyses Provided
- Metals
- Anions
- Cations
- Organics
- Particles
Techniques
Sampling
- UPW extraction
- Acid extraction
- Solvent extraction
- Direct surface analysis
Analytical
- Laser ablation inductively coupled plasma mass spectrometry (LA ICP-MS)
- Glow discharge optical emission spectroscopy (GD-OES)
- Fourier transform infrared spectroscopy (FTIR)
- Raman spectroscopy
- Ultraviolet / visible spectroscopy (UV/VIS)
- Gas chomatography mass spectrometry (GC-MS)
- Thermal desorption gas chomatography mass spectrometry (TD GC-MS)
- Liquid chromatography (LC)
- Thermal gravimetric analysis (TGA)
- Thermo-mechanical analysis (TMA)
- Differential scanning calorimetry (DSC)
Read Related Documentation
Application Notes