Materials are tested for surface and bulk contamination

• Wafer carriers/shippers
• Valves
• Wafers
• Filters and their components
• Piping material
• Tubing/hoses and fittings
• Reactor components
• Wipes, rollers and brushes
• Gloves, gowns and disposables
• Wet bench material
• Polymeric resin beads
• HEPA/ULPA filters
• Any material contained or processed in the cleanroom environment

• Metals
• Anions
• Cations
• Organics
• Particles

Sampling

• UPW extraction
• Acid extraction
• Solvent extraction
• Direct surface analysis

Analytical

• Laser ablation inductively coupled plasma mass spectrometry (LA ICP-MS)
• Glow discharge optical emission spectroscopy (GD-OES)
• Fourier transform infrared spectroscopy (FTIR)
• Raman spectroscopy
• Ultraviolet / visible spectroscopy (UV/VIS)
• Gas chomatography mass spectrometry (GC-MS)
• Thermal desorption gas chomatography mass spectrometry (TD GC-MS)
• Liquid chromatography (LC)
• Thermal gravimetric analysis (TGA)
• Thermo-mechanical analysis (TMA)
• Differential scanning calorimetry (DSC)

Application Notes