Gas Testing [ Return to Products & Services ]

Balazs NanoAnalysis tackles challenging gas analysis problems by taking advantage of its unique combination of reactive gas handling knowledge, ultra-pure chemicals, and world-class analytical facilities. From straightforward compressed gas analysis, to air sampling, to customized wet-chemical digestion schemes, Balazs focuses resources of the world’s largest industrial gas company on your problems.

How Can We Help?

Accreditations

Typical Gases Analyzed

Inert (N₂, O₂, H₂, CDA)
Rare (He, Ne, Ar, Kr, Xe)
Reactive
Advanced precursors (organosilicons, organometallics)
Halocarbons (freons)
Cleanroom air

Analyses Provided

Air components
Rare gases
Trace metals
Assays
Impurity surveys
Pure-gas and gas mixture re-certifications
Volatile contaminants
Sulfur compounds
Others

Analytical Techniques

Gas chromatography - mass spectrometry (GC-MS)
Gas chromatography - discharge ionization detector (GC-DID)
Gas chromatography - flame ionization detector (GC-FID)
Total hydrocarbons analyzer (THC)
Fourier-transform infrared spectroscopy (FTIR)
Real-time: Trace sulfur, Trace Oxygen, and Trace Moisture
Other proprietary methods

Lithography Concerns

In order to maintain full warranty coverage for steppers, manufacturers require tool owners to meet explicit air and purge gas contamination specifications. Additionally, periodic analyses of refractory compounds are also required. In order to fulfill these requirements, Balazs offers stepper environment analyses to meet ITRS and OEM requirements.