Cleanroom Evaluation [ Return to Products & Services ]

Balazs NanoAnalysis is recognized as a world leader in cleanroom contamination control and reduction. Balazs participates in ITRS committees and offer its expertise to advance cleanroom materials and technologies. Balazs remains at the leading edge through innovative methodology development for lower detection limits.

Analyses for:

Organics
Metals
Anions
Cations
Particles

Sample Types and Techniques

Cleanroom Surfaces and Equipment Contamination

Wipe analysis for trace metals by ICP-MS

Material and Components Analyses

In-instrument outgassing by dynamic headspace gas chromatography mass spectroscopy (DHS GC-MS)
Off-line room temperature 40% RH air outgassing by GC-MS
Off-line selected temperature outgassing by GC-MS
IDEMA semi-quantitative DHS-TD-GC-MS Outgass M11-99

Cleanroom Air Analysis and Witness Wafers

Trace metals in air and on witness wafers
Dopants in air (B,P, As, Sb) and on witness wafers (B and P)
Acids and bases in Air (including ammonium and amines)
Organics in air and on witness wafers
Balazs also offers SEMI F21-1102 analysis for molecular acids, bases, condensables and dopants