Chemical Testing [ Return to Products & Services ]
Chemical characterization is critical for incoming quality control, at the point of distribution (POD), and at the point of use (POU) to ensure that chemical species and/or contamination is at a proper concentration for semiconductor process steps.
Sample Types
- Cleaning chemicals
- Processing chemicals
- Lithographic chemicals
- Etching chemicals
- Copper plating solutions
- CVD/ALD Precursor Compounds
- Slurries
Analyses Provided
- Trace Metals
- Anions
- Organics
- Assay
- Material compatibility studies
- SEMI tests
Techniques
Analytical
- Inductively coupled plasma mass spectroscopy (ICP-MS)
- Inductively coupled plasma optical emission spectroscopy (ICP-OES)
- Ion chromatography (IC)
- Gas chromatography mass spectroscopy (GC-MS)
- Fourier transform infrared (FTIR)
- Auto-titrator
Slurry off-line testing solutions
- Particle size and distribution
- % solids
- Specific gravity
- pH
- Viscosity
- Titration for H2O2 or other additives
- Trace metals
- Corrosion inhibitors
- Particles
Slurry on-line testing solutions
- Contact us for more details
Read Related Documents
Articles and Papers
Application Notes
Technical Information
Quick Links to papers, guidelines, application notes...
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